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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

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Subject collections Read the very best research published in IOP Characteristics of attachment instabilities in SF6 inductively coupled

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Printed in the UK PII: S0022-3727(98)87965-5 Simulation of a decaying SF6 arc plasma: hydrodynamic and kinetic coupling study J-B Belhaouari, J-J

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【LRC】SF6 Inductively Coupled Plasmas under Different Coupling

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