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【LRC】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

【LRC】SF6 Inductively Coupled Plasmas under Different Coupling

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Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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